Wafer Level Reliability Monitoring Strategy of an Advanced Multi - Process Cmos
نویسنده
چکیده
Semiconductors Business Unit Foundries wafer fab MOSSYOU has developed an end-of-line ultra-fast relidbility monitoring strategy, which provides a very fast and continuous feedback to the production line. In this work the advantages of such strategy are discussed by means of example cases, including hot-carrier reliability and a new end-of-line monitoring tool for non-volatile memory reliability. .
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تاریخ انتشار 2009